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레고토토

레고토토

레고토토 FAB Center

Smart Development 레고토토 FAB Center

Development of non-memory 레고토토-based sensor technology

레고토토fab Center is developing various hazardous gas sensor devices based on wafers and thin films.
We have a sensor platform that can be used in the hydrogen industry, eco-friendly ships, and eco-friendly workplaces, and are pursuing the development of more advanced technologies.

레고토토 Materials Laboratory

Air Shower Room

Deposition Room

Measurement Room

Photolithography Room

Chemical Laboratory

Status of Technology Development Equipment Possession at 레고토토 FAB Center

We are building equipment to perform eight major semiconductor processes (oxidation process, photo process, etching process, deposition process, metal wiring process, EDS process, packaging process), and have accumulated know-how technology to perform 레고토토 processes.

Sputter

This is 레고토토 that forms a thin layer using thin film deposition technology. This device uses high-energy particles (usually ions) to remove particles from the surface of a solid material and deposit them on another surface, creating a thin film.

Thermal Evaporator

This is a device that heats and evaporates materials, thereby forming a thin film on a substrate or other surface. This is 레고토토 that heats the source material and deposits it on the substrate to form a thin film.

Screen Printer

레고토토 is a technology that prints specific patterns or electrodes. By doing 레고토토, the design or electrode required for the sensor can be applied precisely. Screen printing is a highly productive and cost-effective method for manufacturing a variety of sensors.

Slot-die Coater

This is 레고토토 used to uniformly coat a thin film onto a special subsurface. It is used in a variety of applications requiring thin film coatings, primarily in industry and research. It can work continuously and maintain the correct coating thickness, supporting an efficient and accurate process.

Probe Station

This is equipment for testing or measuring specific devices or devices such as 레고토토s or electronic devices. Basically, a probe station stably positions a small sample or device and makes an electrical connection via a special probe card or needle. This allows you to measure electrical properties such as voltage, current, resistance, and capacity, or investigate optical properties.

Mask Aligner

It is an optical lithography equipment that can obtain fine patterns by placing a photo mask with a circuit drawn on a 레고토토 wafer or glass substrate coated with photo resist (PR) and irradiating UV light. Precision alignment is possible and can be applied to precision alignment and patterning of touch screen panels, flat displays, MEMS/Bio-MEMS, LEDs, etc.